Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation
Parameters
| |
|---|---|
In the image the following parameters are shown:
To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar (the blue circle). | |
| Depth | D*PS |
| Bowing | Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle 2\frac{MW-\frac{TW+BW}{2}}{(TW+BW)}} |
| Sidewall angle | Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle acos(\frac{TW-BW}{2\sqrt{D^2+\frac{1}{4}(TW^2-BW^2)}}) } |
| Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle \sum_{n=0}^\infty \frac{x^n}{n!}} | |