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Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation

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< Specific Process Knowledge‎ | Etch‎ | DRIE-Pegasus

Revision as of 20:24, 4 February 2013 by Jml (talk | contribs) (→‎Parameters)

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Parameters


	Top Width (TW)
	Depth (D)
	Bottom Width (BW)
	Mid Width (MW)
Pixel Size (PS)

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