Specific Process Knowledge/Thermal Process

Choose a process type

A1 Furnace Boron drive-in - For oxidation of new wafers and for drive in of Boron pre-dep
A2 Furnace Boron pre-dep - Dope with Boron: For predeposition of Boron on wafers
A3 Furnace Phosphorus drive-in - For oxidation of new wafers and for drive in of Phosphorus pre-dep
A4 Furnace Phosphorus pre-dep - Dope with Phosphorus: For predeposition of Phosphorus on wafers
C1 Furnace Gate oxide - For growing of Gate Oxide on new wafers
C2 Furnace Anneal oxide - For oxidation and annealing
C3 Furnace Anneal bond - For annealing of bonded wafers and??
C4 Furnace Aluminium anneal - For oxidation and annealing of wafers containing Aluminium
Furnace Noble - For non-clean annealing
Furnace Dry oxide - For oxidation of 2" wafers
Jipelec RTP - For Rapid Thermal Anneal of III-V materials and Silicon based material