Specific Process Knowledge/Thermal Process/BCB Curing Oven

BCB Curing Oven

The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of metal in a nitrogen atmosphere.

During processing the furnace is rapidly heated by use of five halogen lamps below the sample. The furnace is purged with a high or a low nitrogen flow, and there is vacuum on the furnace.

The user manual, user APV, technical information and contact information can be found in LabManager:

The BCB Curing Oven. Located in the III-V Lab

BCB Curing Oven

Process information

There are no standard processes on the furnace.

Equipment performance and process related parameters

Equipment		Resist Pyrolysis Furnace
Purpose		BCB curing and metal alloying
Process parameter range	Temperature	0 - 450oC
	Nitrogen flows	Low N2 flow: 5 SLM High N2 flow: Max 16.7 SLM
Substrates	Batch size	Several small samples (placed on a carrier wafer) One 50 mm wafer (placed on a carrier wafers) One 100 mm wafer
	Allowed materials	BCB Co-polymer Silicon Silicon oxide Silicon nitride Quartz Resist (prebaked) III-V materials Metal