Specific Process Knowledge/Characterization

Choose topic

• Sample imaging
• Topographic measurement
• Stress measurement
• Measurement of film thickness and optical constants
• Wafer thickness measurement
• Element analysis
• Hydrophobicity measurement
• Resistivity measurement
• Other electrical measurements

Choose equipment

• SEM FEI
• SEM LEO
• SEM JEOL
• SEM Zeiss

• Nanoman - Atomic Force Microscopy

• Optical Profiler (Sensofar)
• Dektak XTA_new
• Dektak 8 stylus profiler

Optical characterization

• Ellipsometer
• Filmtek 4000
• Prism Coupler

SIMS: Secondary Ion Mass Spectrometry

• Atomika SIMS

X-ray Photoelectron Spectroscopy (XPS)

• XPS-ThermoScientific