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Specific Process Knowledge/Back-end processing/PDMS Microfluidic

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PDMS microfluidics fabrication at DTU Nanolab

Material requirements

Process flow

Mixing PDMS resin and degassing

Soft lithography micro molding

Mold surface conditioning

Molding by pouring

Molding by spin coating

Baking – Curing

Alignment – Demolding

3D printing

Cutting PDMS

Punching

Laser ablation

Machining/milling

Air/water jet machining

Bonding

PDMS/PDMS and PDMS/glass bonding

PDMS/PMMA bonding

References

For further information contact Stephan Sylvest Keller suke@dtu.dk or Claudia Chaves Villarreal cchvi@dtu.dk