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Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/E1 furnace break-down voltage measurement results

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Revision as of 12:45, 16 September 2025 by Pevo (talk | contribs) (Created page with "==Breakdown voltage results for the E1 8" Oxidation furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''February 2022''' |DRY1050 |117 nm |350x350px|thumb|left |image:2022-02-08_10-47-35_Wafer_E1_117nm_Rel.png|350x350px|thumb|...")
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Breakdown voltage results for the E1 8" Oxidation furnace

Dry oxidation

Date Oxidation recipe Oxide thickness Absolute break-down voltage Relative break-down voltage
February 2022 DRY1050 117 nm
 
 
November 2023 DRY1100 510 nm
 
 
April 2025 DRY1050 115 nm
 
 
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