Template:Peg1Table9Row

! rowspan="3" | {{{RecipeName}}} | colspan="20" style="text-align:left"| {{{PriorProcessSteps}}} ! {{{ActualPressure}}} ! {{{Link2RecipeRun}}} |-

|style="background:darkorange; color:black;" |{{{Temperature}}} |style="background:silver; color:black;" |{{{StartCycleEndCycle}}} |style="background:darkgray; color:black;" |{{{DepositionTime}}} |style="background:greenyellow; color:black;" |{{{PressureDepDelay}}} |style="background:chartreuse; color:black;" |{{{PressureDepBoost}}} |style="background:lawngreen; color:black;" |{{{PressureDepMain}}} |style="background:lightcoral; color:black;" |{{{C4F8DepDelay}}} |style="background:salmon; color:black;" |{{{C4F8DepBoost}}} |style="background:darksalmon; color:black;" |{{{C4F8DepMain}}} |style="background:lightsteelblue; color:black;" |{{{SF6DepDelay}}} |style="background:powderblue; color:black;" |{{{SF6DepBoost}}} |style="background:skyblue; color:black;" |{{{SF6DepMain}}} |style="background:cyan; color:black;" |{{{WCoilDep}}} |style="background:lavender; color:black;" colspan="3" align="center"|{{{WPlatenDep}}} |style="background:cyan; color:black;"|{{{%CoilDepLoad}}} |style="background:gainsboro; color:black;" |{{{%CoilDepTune}}} |style="background:purple; color:black;"|{{{%PlatenEtchLoad}}} |style="background:gainsboro; color:black;"|{{{%PlatenEtchTune}}} ! colspan="2" rowspan="2"| {{{Keywords}}} |- |style="background:gainsboro; color:white;" |{{{PlatenFrequency}}} |style="background:dimgray; color:white;" |{{{NumberOfCycles}}} |style="background:gray; color:white;" |{{{EtchTime}}} |style="background:mediumspringgreen; color:white;" |{{{PressureEtchDelay}}} |style="background:seagreen; color:white;" |{{{PressureEtchBoost}}} |style="background:forestgreen; color:white;" |{{{PressureEtchMain}}} |style="background:crimson; color:white;" |{{{C4F8EtchDelay}}} |style="background:firebrick; color:white;" |{{{C4F8EtchBoost}}} |style="background:darkred; color:white;" |{{{C4F8EtchMain}}} |style="background:deepskyblue; color:white;"|{{{SF6EtchDelay}}} |style="background:dodgerblue; color:white;" |{{{SF6EtchBoost}}} |style="background:cornflowerblue; color:white;"|{{{SF6EtchMain}}} |style="background:darkturquoise; color:white;" |{{{WCoilEtch}}} |style="background:mediumorchid; color:white;"|{{{WPlatenEtchDelay}}} |style="background:mediumpurple; color:white;"|{{{WPlatenEtchBoost}}} |style="background:blueviolet; color:white;"|{{{WPlatenEtchMain}}} |style="background:darkturquoise; color:white;"|{{{%CoilEtchLoad}}} | style="background:gainsboro; color:black;"|{{{%CoilEtchTune}}} |style="background:lavender; color:black;"|{{{%PlatenDepLoad}}} |style="background:gainsboro; color:black;"|{{{%PlatenDepTune}}} |-