LabAdviser/Courses/TPT Thin Film

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule

Theoretical part


1st lecture (2 - 2½ hours):

  • Introduction to thin films
    • Thin film formation
    • Material properties
    • Overview of the techniques
    • LabAdviser
  • PVD (physical Vapour Deposition)
    • General notes on PVD
    • Resistive thermal evaporation
    • E-beam Evaporation
    • Sputtering

The next lecture will be held on the 15th of February 2024 from 9.30-11.30. The lecture will be held in room 121A in building 345C.

Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.

In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”.

You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture.

Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


2nd lecture (3 - 3½ hours):

  • Thermal Oxidation
  • CVD (Chemical Vapour Deposition):
    • LPCVD (Low Pressure Chemical Vapour Deposition)
    • PECVD (Plasma Enhanced Chemical Vapour Deposition)
  • ALD (Atomic Layer Deposition)
    • Thermal ALD
    • Plasma Enhanced ALD
  • Comparison of thin film techniques

The next lecture will be held on the 20th of February 2024 from 9-12. The lecture will be held in room 121C in building 345C.

Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.

In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”.

You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture.

Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


Practical part

  • None
Location

Theoretical part

The locations for the lectures will be notified in the Doodles

Qualified prerequisites

None

Preparations

No preparation is required.

However, a good overview of thin film processes can be found in Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (requires login).

Links to more literature about thin films can be found below.

Course responsible

The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)

Learning goals
  • Be aware of relevant material properties for thin films made in the cleanroom
  • Understand different thin film techniques
  • Compare and be able to select appropriate thin film technique


Presentations from the lectures

Slides from the 1st lecture

Slides from the 2nd lecture

Literature

Some literature about thin films can be found here (requires a login):

Introduction to thin films

Thermal oxidation

Stress in thin films

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