Specific Process Knowledge/Etch/ICP Metal Etcher
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Etching of nanostructures in silicon using the ICP Metal Etcher
| Sinano3.0 | Sinano3.1 | Sinano3.2 | Sinano3.3 | Sinano3.4 | Sinano4.0 | Sinano3.5 | Sinano3.6 | ||
|---|---|---|---|---|---|---|---|---|---|
| Cl2 (sccm) | 0 | 0 | 0 | 0 | 0 | 20 | 15 | 15 | |
| BCl3 (sccm) | 5 | 3 | 5 | 5 | 5 | 0 | 5 | 5 | |
| HBr (sccm) | 15 | 17 | 15 | 15 | 15 | 0 | 0 | 0 | |
| Coil power (W) | 900 (Load) | 900 (Forward) | 900 (Forward) | 900 (Forward) | 900 (Forward) | 900 (Load) | 900 (Load) | 900 (Forward) | |
| Platen power (W) | 50 | 50 | 60 | 75 | 90 | 60 | 60 | 60 | |
| Process time (s) | 150 | 180 | 120 | 180 | 120 | 90 | 120 | 180 | Pressure (mtorr)
2 2 2 2 2 2 5 10 |