Dual-beam Electron Microscopes

Dual-beam Electron Microscopes is the combination of SEM and a focused ion beam. In SEM, a focused beam of accelerated electrons is scanning over a sample. Electrons which are backscattered or secondary generated electrons are collected on a detector. Depending on the type of detector, different signals and sample characteristics can be acquired. The Electron beam is steered by electromagnetic and electrostatic lenses.

The FIB are Ga-ions, which are accelerated towards the sample. The beam can be used for imaging, but also for sputtering off material of the sample. The Ion beam uses only electrostatic lensing and we can detect SE and Secondary Ions from the sample.

In a plasma FIB (PFIB) the ions are created through a plasma of Xe, Ar, O or N and accelerated towards the sample. As in the FIB, the beam can be used for imaging and/or sputtering off material. The PFIB allows for Ga-free sample preparation.

We have two dual-beam microscopes available at DTU Nanolab. Click on the instrument to find more information about the equipment and available techniques:


Helios - FIB-SEM	Hydra - PFIB-SEM