LabAdviser/Courses/TPT Thin Film
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Thin Film TPT
DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.
Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).
| Thin film tool package training (TPT) | |
|---|---|
| Schedule |
Theoretical part1st lecture (2 - 2½ hours):
Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e. No lecture will be held in July. A date for a lecture in August has not been decided yet. If you want to attend the Thin Film TPT course this month, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available. Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
2nd lecture (3 - 3½ hours):
Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf No lecture will be held in July. A date for a lecture in August has not been decided yet. If you want to attend the Thin Film TPT course this month, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available. Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
Practical part
|
| Location |
Theoretical part The location of the lectures will be notified in the Doodles |
| Qualified prerequisites |
None |
| Preparations |
No preparation is required. However, a good overview of thin film processes can be found in Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (requires login). Links to more literature about thin films can be found below. |
| Course responsible |
The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk) |
| Learning goals |
|
Material for preparations and further information
Presentations from the lectures
Slides from the first lecture 1
- See LabManager (required login)
Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx
Slides from lecture 2
- Lecture slide show Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx
Literature
Some literature about thin films can be found here (requires a login):
Introduction to thin films
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films
- D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
- K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films