LabAdviser/Courses/TPT Thin Film

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule

Theoretical part

1st lecture (2 - 2½ hours):

  • Introduction to thin films
  • Before you start - Material properties to consider
  • Overview of thin film techniques at DTU Nanolab
  • Equipment overview in LabAdviser
  • Thin film techniques – 1st part:
    • Thermal oxidation

Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.

The next lecture will be held on the 13th of June 2023 from 10:00 to 12:00.

Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


2nd lecture (3 - 3½ hours):

  • Thin film techniques – 2nd part:
    • PVD (physical vapour deposition)
      • E-beam evaporation
      • Thermal evaporation
      • Sputtering
    • CVD (chemical vapour depostion)
      • LPCVD (low pressure chemical vapour deposition)
      • PECVD (plasma enhanced chemical vapour deposition)
    • ALD (atomic layer deposition)

Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf

The next lecture will be held on the 15th of June from 9:00 to 12:00.

Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


Practical part

  • None
Location

Theoretical part

  • The location of the lectures will be notified in the doodles
Qualified prerequisites
  • None
Preparations
Course responsible
  • The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals
  • Be aware of relevant material properties for thin films made in the cleanroom
  • Understand different thin film techniques
  • Compare and be able to select appropriate thin film technique


Material for preparations and further information

Slides from the lectures

Slides from lecture 1

Slides from lecture 2


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Literature

Some litterature can be found in the LabManager (required a login):

  • S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
  • S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
  • M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
  • K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Film


Thermal Oxidation
Stress in Thin Films
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