Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist

From LabAdviser

This is the full path list as available on the JEOL 9500 system. Please contact the EBL staff if you need a custom path defined on the tool.


Users are NOT allowed to change the path definition file on the system.

;;*** Mask Exposure Peformance Test ***
 MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE 
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 MASK01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE 
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

;;*** Direct Exposure Peformance Test ***
 DIRE00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT
        CYCLE   5M

 DIRE01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT
        CYCLE   5M

;;*** Minimum Line Exposure Peformance Test ***
 MINI01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

;;*** Test Exposure ***
 TEST00: INITIAL HEIMAP
 TEST01: INITIAL CURRNT
 TEST02: INITIAL HEIMAP,CURRNT
 TEST03: INITIAL CURRNT,INITBE
 TEST04: INITIAL HEIMAP,CURRNT,INITBE
 TEST05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
 TEST06: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
 TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
 TEST08:	INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE

 TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   1

 TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   1

 TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M, F

 TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M, F

 TEST13:	INITIAL INITAE,INITBE,CURRNT,PDEFBE
	CYCLIC	DRIFT
	CYCLE	1M, F

 TEST14: INITIAL CURRNT
        CYCLIC  DRIFT
        CYCLE   99

 DRIFT0:	INITIAL INITAE, INITBE
	CYCLIC  INITAE, INITBE, DRIFT, CURRNT
	CYCLE   1

 DRIFT1:	INITIAL INITAE, INITBE
	CYCLIC  INITAE, INITBE, DRIFT, CURRNT
	CYCLE   1M,F

 LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M   
         
 LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE
        CYCLE   5M

 MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,INITBE
        CYCLE   20M

 HEIGH1: INITIAL HEIMAP,CURRNT
        CYCLIC  CURRNT,DRIFT
        CYCLE   10M

 MASK02:	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
	CYCLIC  DRIFT,CURRNT
	CYCLE   4

 MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT
        CYCLE   5M

 AUTO00:	INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE

 DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE   
  
 DIRE03: INITIAL CURRNT,INITBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   20M  
    
 DIRE04: INITIAL CURRNT,INITBE,PDEFBE
        CYCLIC  CURRNT
        CYCLE   20M

 DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT
        CYCLE   20M  
      
 DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
        CYCLIC  CURRNT
        CYCLE   20M

 DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT
        CYCLE   20M

 DRFT01: INITIAL CURRNT
        CYCLIC  DRIFT
        CYCLE   1

 SBG01: 	INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE

 SBG02: 	INITIAL HEIMAP

 SBG03: 	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 SBG04: 	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 SBG05: 	INITIAL CURRNT
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 SBG06: 	INITIAL HEIMAP
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 SBG07: 	INITIAL CURRNT
        CYCLIC  CURRNT,DRIFT
        CYCLE   34

 TOK01: 	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   20M

 G5MHA: 	INITIAL HEIMAP
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 G5MHB: 	INITIAL HEIMAP
        CYCLIC  DRIFT
        CYCLE   5M

 G5MA: 	INITIAL CURRNT
	CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 G5MB: 	INITIAL CURRNT
	CYCLIC  DRIFT
        CYCLE   5M

 G34HA: 	INITIAL HEIMAP
        CYCLIC  CURRNT,DRIFT
        CYCLE   34

 G34HB: 	INITIAL HEIMAP
        CYCLIC  DRIFT
        CYCLE   34

 G34A: 	INITIAL CURRNT
	CYCLIC  CURRNT,DRIFT
        CYCLE   34

 G34B: 	INITIAL CURRNT
	CYCLIC  DRIFT
        CYCLE   34

 G1HA: 	INITIAL HEIMAP
        CYCLIC  CURRNT,DRIFT
        CYCLE   1

 G1HB: 	INITIAL HEIMAP
        CYCLIC  DRIFT
        CYCLE   1

 G1A: 	INITIAL CURRNT
	CYCLIC  CURRNT,DRIFT
        CYCLE   1

 G1B: 	INITIAL CURRNT
	CYCLIC  DRIFT
        CYCLE   1

 HEICU: 	INITIAL HEIMAP,CURRNT

 HCD: 	INITIAL HEIMAP
	CYCLIC  CURRNT,DRIFT
	CYCLE   30M

 CD: 	INITIAL CURRNT
	CYCLIC  DRIFT
	CYCLE   30M

 FT01: 	INITIAL CURRNT
	CYCLIC  CURRNT,DRIFT
	CYCLE   5M,F

 LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE
        CYCLE   5M,F

 HEI: INITIAL HEIMAP
        CYCLIC  CURRNT
        CYCLE   10M

 DRF5M: 	INITIAL CURRNT,HEIMAP
 CYCLIC  CURRNT,DRIFT
 CYCLE   5M,F

 DTU5M:  INITIAL  HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
 	CYCLIC  CURRNT,DRIFT
        CYCLE   5M,F

 CUR:    INITIAL CURRNT	
        CYCLIC  CURRNT
        CYCLE   30M
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