Specific Process Knowledge/Lithography/EBeamLithography/Cassettes

JEOL 9500 cassette specifications page

Wafer cassettes are available for 2", 4", 6" and 8" wafers. Wafers must be intact, i.e. fractions of wafers can not be exposed in these cassettes. Cassettes dedicated chip exposure are also available.

Back side and front side view of cassette BSPCL-520.