Specific Process Knowledge/Lithography/Resist/NILresist

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Revision as of 15:17, 26 January 2023 by Jehem (talk | contribs) (Created page with "Here is a table with 2 different imprint resists we have recently used in the cleanroom, with links to a purchase manufactor, technical reports about resist properties and a current process flow, tested in our cleanroom. {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" width="95%" |- |- |-style="background:silver; color:black" |'''Resist''' |'''Manufacturer''' |'''Comments''' |'''Technical reports''' |'''Thinner''' |'''Spinner''' |'''Rinse''' |'''...")
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Here is a table with 2 different imprint resists we have recently used in the cleanroom, with links to a purchase manufactor, technical reports about resist properties and a current process flow, tested in our cleanroom.

Resist Manufacturer Comments Technical reports Thinner Spinner Rinse Process flows (in docx-format)
Topas micro resist technology Users may purchase own resist. Topas.pdf LabSpin03 or LabSpin03 IPA
mr-I 7030R micro resist technology We purchase only mr-I 7030R, for use it please contact Lithography. mr-I 7030R.pdf mr-T 1050 LabSpin03 or LabSpin03 Acetone Preparation substrate with mr-I 7030R: Preparation substrate‎ with imprint layer
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