Specific Process Knowledge/Etch/Overview of chemicals
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| Chemical | Cas Nr. | Concentration | Grade | Comment |
|---|---|---|---|---|
| Acetone | Cas Nr. | 99,8%-100% | Grade | |
| Ammoniumhydroxyd | Cas Nr. | 28% | Grade | Comment |
| Ammoniumperoxodisulfat | Cas Nr. | 98%-99,1% | Grade | Comment |
| Anisole Anhydrous | Cas Nr. | 99,7% | Grade | Comment |
| AR-600-546 Developer | Cas Nr. | not specific | Grade | Comment |
| AR-600-71 Remover | Cas Nr. | not specific | Grade | Comment |
| AR-6200.09 E-beam resist | Cas Nr. | not specific | Grade | Comment |
| AZ 351B Developer | Cas Nr. | not specific | Grade | Comment |
| AZ 4562 Photoresist | Cas Nr. | not specific | Grade | Comment |
| AZ 5214E Photoresist | Cas Nr. | not specific | Grade | Comment |
| AZ 726MIF developer | Cas Nr. | not specific | Grade | Comment |
| AZ 726MIF developer (Tromle) | Cas Nr. | not specific | Grade | Comment |
| AZ MiR 701 (29CPS) Photoresist | Cas Nr. | not specific | Grade | Comment |
| AZ nLOF 2020 Photoresist | Cas Nr. | not specific | Grade | Comment |
| Boric Acid powder | Cas Nr. | not specific | Grade | Comment |
| Chrome etch 18 | Cas Nr. | not specific | Grade | Comment |
| Developer MIBK Methylisobutylketon 4L | Cas Nr. | not specific | Grade | Comment |
| DUV42S-6,4 L ultra nowpak W/Closure lid | Cas Nr. | not specific | Grade | Comment |
| Ethanol | Cas Nr. | 99,9%-100% | Grade | Comment |
| Hydrofluoric acid buffer (BHF/BOE) | Cas Nr. | 12,5% | Grade | Comment |
| Hydrofluoric acid buffer (BHF/BOE W/wetting agent) | Cas Nr. | 12,5% | Grade | Comment |
| Hexamethyldisilasan | Cas Nr. | not specific | Grade | Comment |
| HYDROFLUORIC ACID (HF) | Cas Nr. | 1% | Grade | VLSI |
| Cas Nr. | 10% | Grade | VLSI | |
| Cas Nr. | 40% | Grade | EMSURE® ISO for analysis | |
| Cas Nr. | 50% | Grade | VLSI | |
| Hydrochloric acid | Cas Nr. | 37% | Grade | Comment |
| Hydrogenperoxid | Cas Nr. | 31% | Grade | Comment |
| KRF m230Y 6cP Gal | Cas Nr. | not specific | Grade | Comment |
| KRF M35G 27cP Gal | Cas Nr. | not specific | Grade | Comment |
| Microposit Remover 1165 | Cas Nr. | not specific | Grade | Comment |
| Nitric acid | Cas Nr. | 69% | Grade | Comment |
| Ortho-Phosphoric acid | Cas Nr. | 85% | Grade | Comment |
| Potassium hydroxide solution | Cas Nr. | not specific | Grade | Comment |
| Propanol | Cas Nr. | not specific | Grade | Comment |
| SU-8 2005 | Cas Nr. | not specific | Grade | Comment |
| SU-8 2035 | Cas Nr. | not specific | Grade | Comment |
| SU-8 2075 | Cas Nr. | not specific | Grade | Comment |
| SU-8 Developer (Mr-dev 600) | Cas Nr. | not specific | Grade | Comment |
| SU-8 Thinner | Cas Nr. | not specific | Grade | Comment |
| Sulfamic acid | Cas Nr. | not specific | Grade | Comment |
| Sulfuric acid | Cas Nr. | 95%-97% | Grade | Comment |
| TI spray | Cas Nr. | not specific | Grade | Comment |
| ZED N50 | Cas Nr. | not specific | Grade | Comment |
| Triton x-100 | Cas Nr. | not specific | Grade | Comment |