Specific Process Knowledge/Back-end processing/LatticeAxe

From LabAdviser

The Cleaver: Lattice Axe is designed for cleaving wafers into smaller pieces without leaving any particles on the sample. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: lattice axe should always be placed inside Fume hood 5.

Approved Materials:

  • Si
  • Quartz
  • Pyrex (Borofloat 33)
  • GaAs
  • InP
  • Sapphire

The LatticeAxe can cleave samples from 100mm down to 10mm. In some cases it can even be used on 150mm samples please contact wetchemistry group for more information

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