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Specific Process Knowledge/Thin film deposition/Deposition of NiFe

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Deposition of Nickel Iron alloy

Nickel Iron alloy, e.g., Invar, has been sputter deposited in the Sputter-system (Lesker) here at Nanolab.

You will find detailed results of varying the process parameters when sputtering Ni-Fe in the Lesker sputter system here.

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