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FIB-SEM

Dual-beam Electron Microcopes - Focused Ion Beam and Scanning Electron Microscope (FIB-SEM) is the combination of SEM and a focused ion beam. In SEM, a focussed beam of accelerated electrons is scanning over a sample. Electrons which are backscattered or secondar generated electrons are collected on a detector. Dependenging on the type of detector, different signals and sample characteristics can be acquired. The electron beam is steered by electromagnetic lenses.

The FIB are Ga-ions, which are accelerated towards the sample. The beam can be used for imaging, but also for sputtering off material of the sample.

We have one FIB-SEM available at DTU Nanolab. Click on the instrument to find more information about the equipment and available techniques:


Helios

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