Specific Process Knowledge/Back-end processing/Polisher CMP

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Polisher/Lapper

The Logitech PM5 Polisher/Lapper

The Logitech Orbis Polisher (CMP) is for polishing wafers (removing material in the nm range) it is not for thinning down wafers or other substrates.


The user manual, user APV, technical information and contact information can be found in LabManager:

The Logitech PM5 Polisher/Lapper in LabManager