Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned
Processing of high resolution scanned spectra
The analysis is continued from here.
We start with the Al2p peak. Below is shown the etch level 23. Click 'Peak Fit' and select 'Add doublet' (Not 'Add Single Peak' ). In the tab 'Fit Peaks' click 'Fit All Levels'.
So far we did not add any constraints at all. That means the Al2p spin orbit doublet is free to shift binding energy or FWHM.
Scrolling through the etch levels (seen in the bottom of the image below slightly to the right) one can see that the fitting is good. There is some energy shifts but we will ignore that for now.