Specific Process Knowledge/Thin film deposition

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Revision as of 08:02, 19 September 2007 by BGE (talk | contribs) (New page: == Choose material to be deposit == === Metals === *Aluminium *Gold *Titanium *Nickel === Dielectric materials === *Silicon oxide *Silicon nitride === Other materials === *PolySilico...)
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Choose material to be deposit

Metals

  • Aluminium
  • Gold
  • Titanium
  • Nickel

Dielectric materials

  • Silicon oxide
  • Silicon nitride

Other materials

  • PolySilicon