Specific Process Knowledge/Characterization/Thickness Measurer
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Thickness measurer
The purpose is to measure hardness of samples or films.
The user manual, technical information and contact information can be found in LabManager:
Quality Control - Recipe Parameters and Limits
Quality Control (QC) for the Thickness measurer |
The measured standard thickness is 0.1 mm. The QC is performed x times a year. |
Purpose |
Thickness measurer |
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---|---|---|
Performance |
Thickness resolution |
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Substrates |
Batch size |
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Substrate materials allowed |
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