Specific Process Knowledge/Lithography/Coaters/SprayCoater
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Spray Coater
The spray coater at Danchip is located in Cleanroom C-1. The machine is an ExactaCoat from Sono-tek which can be fitted with one of three different nozzles depending on the nature of the spray coating tasks at hand. The three different nozzles (Impact, AccuMist and Vortex) are optimized for different applications such as spray coating of large areas (e.g. entire wafers), smaller areas (e.g. wafer pieces or other small samples) or already structured samples that cannot be coated uniformly by spin coating. All nozzles use an ultrasonic tranducer for atomizing the solution to be spray coated. It is therefore a prerequisite that all components are compatible with this process. This is the case with most substances, although process parameters may need optimization to give satisfactory results.
Practically any sample that will fit inside the spray coater can be processed. Spray patterns are easily programmed either using predefined spray patterns (1D line, 2D rectangles/circles/meanders/spirals) or custom 3D spray patterns.
The spray coating process as well as major features of the three nozzles are described into more detail in the manual which can be found via the Equipment Info page in LabManager under the Documents sections. The manual can also be found by clicking this direct link.
Further information about the spray coater (current status, process log, APV, technical information etc. can be found in LabManger:
| Equipment | Spray Coater | |
|---|---|---|
| Purpose |
| |
| Performance | Substrate handling |
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| Permanent media |
| |
| Manual dispense option |
| |
| Process parameter range | Solution viscosity |
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| Chemical properties |
| |
| Substrates | Batch size |
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| Allowed materials |
| |