Specific Process Knowledge/Characterization/XPS/Processing/Basics

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XPS data processing guide

This section is intended as an introduction to the analysis of XPS data. Simple examples are chosen to illustrate the procedures. All actions performed with Avantage (version 5.498) during an analysis of a sample are shown.

In case you want to follow along with your own analysis, you can download the data from here (this file is a .zip file that has been renamed to .doc in order to be uploaded to LabAdviser, so download and rename to .zip and extract the files)

  1. Survey spectra analysis: Open data, spectrum views, depth profile, survey spectrum peak identification, click here
  2. High resolution spectra analysis: Open spectra, add background and peaks, apply constraints to fitting
  3. Complete the analysis


  1. Survey spectra analysis: Open data, spectrum views, depth profile, survey spectrum peak identification, click here
  2. High resolution spectra analysis: Open spectra, add background and peaks, apply constraints to fitting
  3. Complete the analysis
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