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Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic

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< Specific Process Knowledge‎ | Etch‎ | DRIE-Pegasus

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**Mediumiso**
Recipe	Step	Temperature	Pressure	C₄F₈	SF₆	O₂	Ar	Coil	Platen	Runs	Key words
mediumiso1	-	20	25	0	150	0	0	600	3	1	NA
Isoslow7		10	10		80		150	3	1
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