Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Lasers sources
Laser sources
The laser micromachining tool is equipped with two laser sources (1) picosecond laser (TBW) and (2) a nanosecond laser (IPG). The technical specification provided by the supplier 3D micromac are shown below.
Specifications from 3D micromac
Picosecond (TBW) | Nanosecond (IPG) | |
Wavelength | 1064nm, 532nm, 355nm | 1064nm |
Pulse duration | 10ps | 120ns |
Repetition rate | 200 kHz up to 8000 kHz software controlled | 200kHz |
Output power | > 50 W @ 1064 nm | 100 W |
Warm-up time | 25min | none |