Specific Process Knowledge/Wafer cleaning/cleaning with HF

From LabAdviser
Revision as of 14:05, 27 February 2008 by BGE (talk | contribs) (New page: Is in use during the RCA procedure. These baths must only be used in the RCA procedure or to remove native oxide on new wafers from the box. See the [[Process Knowledge/Wafer cleaning/RCA|...)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Is in use during the RCA procedure. These baths must only be used in the RCA procedure or to remove native oxide on new wafers from the box. See the RCA page for further details.