Specific Process Knowledge/Characterization/Lifetime scanner MDPmap

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Lifetime scanner MPDmap, positioned in cleanroom D-3.

The user manual, control instruction, the user APV and contact information can be found in LabManager:

Lifetime scanner MPDmap info page in LabManager,

Equipment performance and process related parameters

Equipment
Purpose		Carrier Lifetime Photoconductivity
Location		D-3
Performance	Resolution
Instrument specifics	Detector
	Laser	405 nm Power 5 mW to 100 mW 978 nm Power 5 mW to 140 mW 975 nm Power 0.5 W to 4.0 W
	Electron source
	Operating pressures
	Options
Substrates	Batch size	1 100 mm wafer 1 150 mm wafer 1 200 mm wafer (not full view) Smaller samples
	Allowed materials	Any standard cleanroom materials.