Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch
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Barc Etch
Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need.Here is an example of a barc etch I have started testing.
| Parameter | Barc etch with CF4 |
|---|---|
| Coil power | 800W |
| Platen power | 100W |
| Pressure | 3 mTorr |
| Flow rate CF4 | 4 sccm |
| Flow rate H2 | 20sccm |
| Parameter | Results |
|---|---|
| Etch rate in barc | 52nm in 30s [bghe 20150519] |
| Etch rate in KRF resist | 27 nm in 30s [bghe 20150519] |
| Selectivity KRF:Barc | 1:2 |
| Etch 65nm barc | Use 40-45s |