Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/SOI/SOI

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Process runs
Date Substrate Information Process Information SEM Images
Wafer info Mask Material/ Exposed area Tool / Operator Conditioning Recipe Wafer ID Comments
15/12-2014 4" Wafer with travka65 mask AZ standard Si / 65 % Pegasus/jmli 10 minute TDESC clean danchip/jml/showerhead/SOI/SOI, 96 cyc or 8:00 mins S00474 New showerhead

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