Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/Crystal Settings
Settings for Crystal thickness monitor 1 | |||||
Date | Tooling factor: TiO2 | Tooling factor: SiO2 | Tooling factor: Si | ||
---|---|---|---|---|---|
22-7-2014 | 1.573 (wafer center) | ||||
B | B1 | B2 | B3 | ||
C | C1 | C2 | C3 | ||
D | D1 | D2 | D3 |
Settings for Crystal thickness monitor 2 | |||||
1 | 2 | 3 | 4 | 5 | |
---|---|---|---|---|---|
A | A1 | A2 | A3 | A4 | A5 |
B | B1 | B2 | B3 | B4 | B5 |
C | C1 | C2 | C3 | C4 | C5 |
D | D1 | D2 | D3 | D4 | D5 |