Specific Process Knowledge/Thin film deposition

Choose material to deposit

Metals

• Aluminium
• Nickel
• Titanium
• Gold

Polymers

• SU8
• Antistiction coating

Other materials

• Silicon Nitride
• Silicon Oxide
• PolySilicon

Choose deposition equipment

• Alcatel - E-beam evaporator and sputter tool
• Leybold - E-beam evaporator and multiple wafer tool
• Wordentec - Metal evaporator and ?
• Hummer - Gold sputtering system
• PECVD - Plasma Enhanced Chemical Vapor deposition
• B2 Furnace LPCVD Nitride - Deposition of silicon nitrid
• B3 Furnace LPCVD TEOS - Deposition of silicon oxide
• B4 Furnace LPCVD PolySilicon - Deposition of polysilicon
• MVD - Molecular Vapor Deposition