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1
KOH etch -
Anisotropic silicon etch
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Specific Process Knowledge/Etch/KOH Etch
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Etch
Revision as of 09:25, 24 January 2008 by
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KOH etch -
Anisotropic silicon etch
KOH etch for 4" wafers: positioned in cleanroom 3
KOH is an anisotropic Si-etch.
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