Specific Process Knowledge/Characterization

Choose characterization topic (to find which tool to use)

• Sample imaging
• Topographic measurement
• Stress measurement
• Measurement of film thickness and optical constants
• Wafer thickness measurement
• Element analysis
• Hydrophobicity measurement
• Resistivity measurement
• Scanning Electron Microscopy

Choose equipment

• SEM FEI
• SEM LEO
• SEM JEOL
• SEM Zeiss

• Nanoman - Atomic Force Microscopy

• Optical Profiler (Sensofar)
• Dektak XTA_new
• Dektak 8 stylus profiler

• Optical microscope

• Ellipsometer
• Filmtek 4000
• Prism Coupler

• Photoluminescence Mapper

• Atomika SIMS
• XPS-ThermoScientific

• Drop Shape Analyzer

• 4-Point Probe

• Thickness Measurer

• Probe station

• KLA-Tencor Surfscan 6420