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1
Clean with:
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Specific Process Knowledge/Wafer cleaning
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From LabAdviser
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Specific Process Knowledge
Revision as of 13:35, 4 October 2007 by
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Clean with:
RCA -
two step process to remove organics and metals
7-up -
piranha etch of wafers and masks - removes organiscs and alkali ions
BHF -
etching of predep glass
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