Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420
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KLA-Tencor Surfscan 6420
Particle counting of an unpatterned surface. A broad range of particles size from 0.15 µm to greater than 3 µm can be measured on a polished silicon or epitaxial layers. Thin films like Nitride and thermal Oxide can also be inspected. The system will remove small surface roughness so it will not count as particles.
The user manual and contact information can be found in LabManager:
http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=changestatus&page_id=50
Process information
Nor process information yet.
Purpose |
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Performance | Particles size |
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Througput |
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Repeatbility |
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Process parameter range | Process Temperature |
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Substrates | Batch size |
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Substrate materials allowed |
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