Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420
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Revision as of 11:20, 3 June 2013 by Pevo (talk | contribs) (→Overview of the performance of the Surfscan 6420 and some process related parameters)
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KLA-Tencor Surfscan 6420
Particle counting of an unpatterned surface. A broad range of particles size from 0.15 µm to greater than 3 µm can be measured on a polished silicon or epitaxial layers. Thin films like Nitride and thermal Oxide can also be inspected. The system will remove small surface roughness so it will not count as particles.
Purpose |
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Performance | Particles size |
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Througput |
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Repeatbility |
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Process parameter range | Process Temperature |
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Substrates | Batch size |
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Substrate materials allowed |
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