Specific Process Knowledge/Thin film deposition/Deposition of Germanium
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Deposition of Germanium
Germanium can be deposited by thermal evaporation.
Thermal evaporation (Wordentec) | |
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Batch size |
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Pre-clean | RF Ar clean |
Layer thickness | 10Å to about 2000Å |
Deposition rate | From 0.4 Å/s up to about ~2Å/s |
Comment | Recommended for unexposed e-beam resist |
Allowed substrates |
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Allowed materials |
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