Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142-pxnano2
nano1.42 versus pxnano2
Recipe | Gas | C4F8 75 sccm, SF6 38 sccm |
---|---|---|
Pressure | 4 mTorr, Strike 3 secs @ 15 mTorr | |
Power | 800 W CP, 40 W PP | |
Temperature | -20 degs | |
Hardware | 100 mm Spacers | |
Time | 120 secs | |
Conditions | Run ID | 2017 |
Conditioning | Sequence: Oxygen clean, MU tests, processes, no oxygen between runs | |
Mask | 211 nm zep etched down to 82 nm |
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The 30 nm trenches etched 120 seconds nano1.42
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The 30 nm trenches etched 96 seconds pxnano2
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The 60 nm trenches etched 120 seconds
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The 60 nm trenches etched 96 seconds
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The 90 nm trenches etched 120 seconds
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The 90 nm trenches etched 96 seconds
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The 120 nm trenches etched 120 seconds
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The 120 nm trenches etched 96 seconds
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The 150 nm trenches etched 120 seconds
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The 150 nm trenches etched 96 seconds