LabAdviser/Courses/TPT Thin Film

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule	Theoretical part 1st lecture (2 - 2½ hours): Introduction to thin films Thin film formation Material properties Overview of the techniques LabAdviser PVD (physical Vapour Deposition) General notes on PVD Resistive thermal evaporation E-beam Evaporation Sputtering Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e. The next lecture will be held on the 15th of February 2024 from 10-12. The lecture will be held in room 121A in building 345C. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. 2nd lecture (3 - 3½ hours): Thermal Oxidation CVD (Chemical Vapour Deposition): LPCVD (Low Pressure Chemical Vapour Deposition) PECVD (Plasma Enhanced Chemical Vapour Deposition) ALD (Atomic Layer Deposition) Thermal ALD Plasma Enhanced ALD Comparison of thin film techniques Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf The next lecture will be held on the 20th of February 2024 from 9-12. The lecture will be held in room 121C in building 345C. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. Practical part None
Location	Theoretical part The locations for the lectures will be notified in the Doodles
Qualified prerequisites	None
Preparations	No preparation is required. However, a good overview of thin film processes can be found in Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (requires login). Links to more literature about thin films can be found below.
Course responsible	The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals	Be aware of relevant material properties for thin films made in the cleanroom Understand different thin film techniques Compare and be able to select appropriate thin film technique

Presentations from the lectures

Slides from the 1^st lecture

• See LabManager (requires a login)

Slides from the 2^nd lecture

• See LabManager (requires a login).

Literature

Some literature about thin films can be found here (requires a login):

Introduction to thin films

• S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
• S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films
• D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
• K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films

Thermal oxidation

• S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation

Stress in thin films

• Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
• Dektak stress measurements