LabAdviser/Courses/TPT Thin Film

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule

Theoretical part

1st lecture (2 - 2½ hours):

  • Introduction to thin films
  • Before you start - Material properties to consider
  • Overview of thin film techniques at DTU Nanolab
  • Equipment overview in LabAdviser
  • Thin film techniques – 1st part:
    • Thermal oxidation

Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.

The next lecture will be held on the 13th of June 2023 from 10:00 to 12:00.

No lecture will be held in July

The dates for the lectures in August or September have not been decided yet. If you want to attend the Thin Film TPT course one of these months, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available.

Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


2nd lecture (3 - 3½ hours):

  • Thin film techniques – 2nd part:
    • PVD (physical vapour deposition)
      • E-beam evaporation
      • Thermal evaporation
      • Sputtering
    • CVD (chemical vapour depostion)
      • LPCVD (low pressure chemical vapour deposition)
      • PECVD (plasma enhanced chemical vapour deposition)
    • ALD (atomic layer deposition)

Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf

The next lecture will be held on the 15th of June from 9:00 to 12:00.

Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


Practical part

  • None
Location

Theoretical part

  • The location of the lectures will be notified in the doodles
Qualified prerequisites
  • None
Preparations
Course responsible
  • The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals
  • Be aware of relevant material properties for thin films made in the cleanroom
  • Understand different thin film techniques
  • Compare and be able to select appropriate thin film technique


Material for preparations and further information

Slides from the lectures

Slides from lecture 1

Slides from lecture 2


THIS PAGE IS UNDER CONSTRUCTION

Literature

Some litterature can be found in the LabManager (required a login):

  • S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
  • S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
  • M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
  • K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Film


Thermal Oxidation
Stress in Thin Films
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