Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic

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Mediumiso
Recipe Step Temperature Pressure C4F8 SF6 O2 Ar Coil Platen Runs Key words
Mediumiso1 - 20 25 0 150 0 0 600 3 1 Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen
Isoslow7 - 10 10 0 80 0 0 150 3 1
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