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As stated by Nguyen et al., the SF6 and O2 fluxes are only separated after 4 s during the C-step, so shorter times than that do not execute the clearing step correctly. After testing the same recipe with only 1 s or without the C-step, it was understood it could be eliminated, showing more deepth as well as less undercut. From then on, not CORE but ORE recipes were applied (D/E = O/RE).