Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly5

Unless otherwise stated, all content on this page was created by Jonas Michael-Lindhard, DTU Nanolab

**Process runs**
Date	Substrate Information				Process Information				SEM Images
Date	Wafer info	Mask	Material/ Exposed area	Tool / Operator	Conditioning	Recipe	Wafer ID	Comments	SEM Images
3/12-2014	1/4 6" Wafer with 210 nm oxide and 1800 nm polysilicon CB on oxide carrier	standard stepper mask (50 nm barc + 320 nm krf)	Si / 50+ %	Pegasus/jmli	10 minute TDESC clean + 45 sec barc etch	nanolab/jml/showerhead/Cpoly5, 20 cycles or 2:20 minutes	S004734	New showerhead