Specific Process Knowledge/Characterization/XPS/Processing

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XPS Data processing

Avantage: How to analyze data

In this section, all steps (import data, add peaks and backgrounds etc.) of the analysis are described.

XPS Simplified

The web page XPS Simplified is a ThermoScientific page where you can find a lot of information about the techniques, the hardware, data analysis etc.

XPS Knowledge View

A knowledge database providing specific information on every element is included in the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click HERE to get information on how to access XPS Knowledge View in Avantage.

Basic instructions

Click HERE to have a complete walk-through of an example. This includes

• Open data file
• Open and analyze survey spectrum
• Analyze high resolution spectra of the individual spectra:
  • Add background
  • Add peaks
  • Quantify
• Analyze depth profiles

Guidelines on data processing

Click HERE to see some general guidelines on data processing in Avantage.

Examples of data analysis

• Depth profile of ALD layers: Silicon wafer with 15 nm Al₂O₃, 15 nm of TiO₂ and 16 nm of HfO₂

• Depth profile of a silicon wafer with nitride, polysilicon and oxide layer

Periodic table with binding energies of all elements

• Specific Process Knowledge/Characterization/XPS/Processing/PeriodicTable