Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/SIMS settings
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This page is written by Berit Herstrøm @ DTU Nanolab (BGHE) if nothing else is stated - 2015
| SIMS setting for different materials | ||
| Lower plate | Upper plate | |
|---|---|---|
| Ti | -1 | |
| Si | -1 | (2) |
| Al | -1 | 1 |
| Cr | -1 | |
| Ni | -6 | |