Specific Process Knowledge/Cleanroom Chemicals

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Acids and bases

• BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid)
• BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammoniumbi fluoride, Hydroflouric acid)
• BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammoniumbi fluoride, Hydroflouric acid)
• HF 5%
• HF 40%
• Nitric acid 69%

Developers

AR 600-546 (Amyl acetate) AZ 351B (NaOH based) AZ 726 MIF (TMAH based) ZED-N50 (n-Amylacetate)

Resists

• AR-P 6200.09
• DUV42S-6 (BARC for stepper)
• SU-8 2005
• SU-8 2035
• SU-8 2075

Solvents

• 1165
• Acetone
• Anisole
• AR 600-71 (Mixture of Dioxolane, PGME)
• A-Thinner (Anisole)
• Ethanol
• IPA
• MIBK
• PGMEA

Other chemicals

• HMDS