Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings

From LabAdviser
< Specific Process Knowledge‎ | Etch‎ | DRIE-Pegasus‎ | Pegasus-2
Revision as of 12:50, 28 June 2023 by Jmli (talk | contribs)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Feedback to this page: click here


Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab

Correct settings for temperatures on Pegasus 2

The Platen chiller temperature is enabled and the setpoint is 20 degrees as seen in the image below. This setting could be applied to all the heaters, however, the best way by far is to run the processes without enabling the heaters as seen for the other heaters.

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings&oldid=46754"